CENTROTHERM PECVD PDF

Given that the deposition is limited to the wafers and graphite boats, the process tubes are only marginally impacted by parasite coating and have to be cleaned fairly once a year. As a rule, the cleaning and re-etching of the process boats is costly and time consuming since they have to be disassembled and reassembled. The new patented centrotherm process boats dispense with the need for dismantling and thereby allows our customers to save a good deal of time and added staff. Moreover, yield declines and the risk of damages to the boats as a result of improper handling are also minimized.

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Here, centrotherm will be presenting its solutions that offer solar cell manufacturers expedient options to reduce their production costs as well as boosting process flexibility for tomorrow's cell and production concepts.

This is achieved through almost doubled system throughput of more than MW per year and lower media consumption. The centrotherm low-pressure technology opens up a broad corridor for new diffusion processes for solar cell manufacturers, especially through the fast and changing deployment of gases in the process tube.

Currently, centrotherm low-pressure diffusion systems are already installed in mass production with a total capacity of more than 1. In a joint project with the International Solar Energy Research Center ISC in Constance, centrotherm is developing a new low-pressure process for highly efficient boron doping.

This enables efficiency enhancement and production cost reduction for n-type solar cells, especially through the integration of upstream and downstream process steps and shorter process times. Together with ISC Constance and SIBCO, centrotherm is offering process and system packages for the mass production of bifacial n-type silicon solar cells that achieve efficiencies of over All of the processes required for this have been tested in mass production and developed on centrotherm production systems.

These cells are optimally designed and compatible for standard solar module manufacturing. The integration of the BiSoN cell concept into existing mass manufacturing is possible due to the deployment of proven centrotherm production systems entailing low investment and time expense. Compared with p-type silicon solar cells, n-type cells possess greater efficiency potential and do not exhibit light-induced degradation.

Cell efficiencies can be boosted considerably through avoiding recombination losses and increasing reflectivity on the cell rear side. Upgrade packages for centrotherm PECVD systems will be available for our customers during the second half of New systems can be ordered from Our customers' requirements vary greatly. Our evolutionary approach guarantees our customers that centrotherm systems deployed in their production can be upgraded to the latest state-of-the-art with process and hardware upgrade packages from our technicians, or that new cell concepts such as centaurus PERC or BiSoN n-type can be integrated into existing and new production lines.

Along with our systems' performance, this is a critical factor for our customers' investments that also offers additional security and flexibility for the future," notes Dr. Josef Haase, Senior Vice President Technology Photovoltaics, before adding: "With a track record of more than 2, installed systems and the construction of more than 50 turnkey production lines, centrotherm has the world's largest installed base of PV systems in operation. In addition, most leading producers' production lines are constructed according to our established manufacturing concept.

This allows us to offer our customers solutions that span different industrial sectors. Examples include technology for the atomic layer deposition or texturing from our subsidiary FHR Anlagenbau. As a leading and globally operating technology group, we offer production solutions for the photovoltaic, semiconductor and microelectronic industries. The continuous further development of our successful solutions in thermal processing and coating, such as for manufacturing crystalline solar cells and power semiconductors, form the basis for our successful partnerships with industry, research and development.

Our customers worldwide appreciate our production systems' process stability, scalability and availability in mass production. Above and beyond this, our work is distinguished by the fact that we create high-end process technology solutions which are specific for our customers and tailored to their requirements, and the fact that we are outstanding in system building.

We jointly confront the daily challenges of setting new trends, maximizing the efficiency of producing, for example, solar cells and semiconductors, and, coupled with our long machine durations, of securing investments.

In this way, we generate valuable competitive advantages for our customers through targeted innovations to processes and production solutions. Our around staff worldwide are committed to the further development of high-tech solutions for key markets.

Home Investor Relations News. Back to News. Low-pressure boron diffusion In a joint project with the International Solar Energy Research Center ISC in Constance, centrotherm is developing a new low-pressure process for highly efficient boron doping.

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Here, centrotherm will be presenting its solutions that offer solar cell manufacturers expedient options to reduce their production costs as well as boosting process flexibility for tomorrow's cell and production concepts. This is achieved through almost doubled system throughput of more than MW per year and lower media consumption. The centrotherm low-pressure technology opens up a broad corridor for new diffusion processes for solar cell manufacturers, especially through the fast and changing deployment of gases in the process tube. Currently, centrotherm low-pressure diffusion systems are already installed in mass production with a total capacity of more than 1. In a joint project with the International Solar Energy Research Center ISC in Constance, centrotherm is developing a new low-pressure process for highly efficient boron doping. This enables efficiency enhancement and production cost reduction for n-type solar cells, especially through the integration of upstream and downstream process steps and shorter process times.

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PECVD Wafer Boat Upgrade

The centrotherm standard PECVD system is designed for deposition processes of a variety of silicon nitride layers and layer stacks with a refractive index ranging from 1. With respect to advanced high-efficiency solar cell designs the standard PECVD process system is pushed to its limits. The upgrade kit widens the process range and therefore contributes to substantially enhance your competitive position by integrating efficiency-enhancing processes and reducing PID effects. The centrotherm N 2 O process upgrade allows enhanced results and an improved flexibility regarding anti-reflection coating and passivation in mono and multi solar cell processing for improved efficiency and cell appearance. For various high performance solar cell technologies the centrotherm N 2 O process upgrade becomes essential. Thus, for dielectric rear side passivation in combination with local BSF contacts, e. No additional production tool required No efficiency loss on cell level No BOM adjustment on module level Multiple field results on improved PID resistance Improved process flexibility The centrotherm N 2 O process upgrade allows enhanced results and an improved flexibility regarding anti-reflection coating and passivation in mono and multi solar cell processing for improved efficiency and cell appearance.

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